Hot filament deposition system



The system uses heated tungsten (wolfram) wire to heat up the desired material for the evaporation. The entire chamber is kept under the 10^(-6) mbar vacuum. By controlling exposure time of the samples inside the hot filament deposition system's chamber, uniform films thickness of only few nanometers is achievable.







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Address: Institute of Physics,Pregrevica 118, Belgrade 11080 (Zemun) Serbia
Telephone:+381 11 3713190
FAX:+381 11 3160531